<mets:mets OBJID="eprint_11036" LABEL="Eprints Item" xsi:schemaLocation="http://www.loc.gov/METS/ http://www.loc.gov/standards/mets/mets.xsd http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-3.xsd" xmlns:mets="http://www.loc.gov/METS/" xmlns:mods="http://www.loc.gov/mods/v3" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"><mets:metsHdr CREATEDATE="2022-03-19T15:08:18Z"><mets:agent ROLE="CUSTODIAN" TYPE="ORGANIZATION"><mets:name>Zhytomyr State University Library</mets:name></mets:agent></mets:metsHdr><mets:dmdSec ID="DMD_eprint_11036_mods"><mets:mdWrap MDTYPE="MODS"><mets:xmlData><mods:titleInfo><mods:title>Патент 83664 Україна, МПК Н01L 21/268. Спосіб створення омічного контакту до InP та GaAs</mods:title></mods:titleInfo><mods:name type="personal"><mods:namePart type="given">О. Є.</mods:namePart><mods:namePart type="family">Бєляєв</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">О. В.</mods:namePart><mods:namePart type="family">Бобиль</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">В. М.</mods:namePart><mods:namePart type="family">Іванов</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">Р. В.</mods:namePart><mods:namePart type="family">Конакова</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">Я. Я.</mods:namePart><mods:namePart type="family">Кудрик</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">С. В.</mods:namePart><mods:namePart type="family">Новицкий</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:name type="personal"><mods:namePart type="given">А. В.</mods:namePart><mods:namePart type="family">Саченко</mods:namePart><mods:role><mods:roleTerm type="text">author</mods:roleTerm></mods:role></mods:name><mods:classification authority="lcc">QC Physics</mods:classification><mods:classification authority="lcc">TK Electrical engineering. Electronics Nuclear engineering</mods:classification><mods:originInfo><mods:dateIssued encoding="iso8061">2013-09-25</mods:dateIssued></mods:originInfo><mods:genre>Patent</mods:genre></mets:xmlData></mets:mdWrap></mets:dmdSec><mets:amdSec ID="TMD_eprint_11036"><mets:rightsMD ID="rights_eprint_11036_mods"><mets:mdWrap MDTYPE="MODS"><mets:xmlData><mods:useAndReproduction>
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