?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Tomash%D1%96%D0%BA%2C+Z.+F.&rft.aulast=Tomash%D1%96%D0%BA&rft.aufirst=Z.+F.&rft.date=2004&rft.atitle=Gibbs+Diagrams+in+the+Chemical+Etching+of+Semiconductors&rft.title=Phase+Diagrams+in+Materials+Science%2C+MSI+GmbH&rft.pages=171-174&rft.genre=article