"17959","12","archive","65",,,"disk0/00/01/79/59","2015-06-23 20:46:31","2015-06-23 20:53:08","2015-06-23 20:46:31","article",,,"show",,,,"","","","","","","","","","",,,,"Gibbs Diagrams in the Chemical Etching of Semiconductors","english",,,,,,,,"","","","",,,,,,,"Tomashік","Z. F.","","","","","pub","QD","sch_che","public",,,,,"2004","published",,"Phase Diagrams in Materials Science, MSI GmbH",,,,,"171-174",,,,,,,,,,,"TRUE",,,,,,,,"",,"","",,"","",,,,,,"",,,,,,,"",,,,,"",,,,,"","",,,,,"","",
"17959",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Bіlevych","Ye. О.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,
"17959",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Tomashік","V. М.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,
"17959",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Kusіaк","N. V.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,
"17959",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Gumenіuк","О. R.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,