<didl:DIDL xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:didl="urn:mpeg:mpeg21:2002:02-DIDL-NS" xmlns:dii="urn:mpeg:mpeg21:2002:01-DII-NS" xmlns:dip="urn:mpeg:mpeg21:2002:01-DIP-NS" xmlns:dcterms="http://purl.org/dc/terms/" DIDLDocumentId="http://eprints.zu.edu.ua/id/eprint/17959" xsi:schemaLocation="urn:mpeg:mpeg21:2002:02-DIDL-NS http://standards.iso.org/ittf/PubliclyAvailableStandards/MPEG-21_schema_files/did/didl.xsd urn:mpeg:mpeg21:2002:01-DII-NS http://standards.iso.org/ittf/PubliclyAvailableStandards/MPEG-21_schema_files/dii/dii.xsd urn:mpeg:mpeg21:2005:01-DIP-NS http://standards.iso.org/ittf/PubliclyAvailableStandards/MPEG-21_schema_files/dip/dip.xsd">
  <didl:Item>
    <didl:Descriptor>
      <didl:Statement mimeType="application/xml">
        <dii:Identifier>http://eprints.zu.edu.ua/id/eprint/17959</dii:Identifier>
      </didl:Statement>
    </didl:Descriptor>
    <didl:Descriptor>
      <didl:Statement mimeType="application/xml">
        <dcterms:modified>2015-06-23T20:53:08Z</dcterms:modified>
      </didl:Statement>
    </didl:Descriptor>
    <didl:Component>
      <didl:Resource mimeType="application/xml" ref="http://eprints.zu.edu.ua/cgi/export/eprint/17959/DIDL/zu2-eprint-17959.xml"/>
    </didl:Component>
    <didl:Item>
      <didl:Descriptor>
        <didl:Statement mimeType="application/xml">
          <dip:ObjectType>info:eu-repo/semantics/descriptiveMetadata</dip:ObjectType>
        </didl:Statement>
      </didl:Descriptor>
      <didl:Component>
        <didl:Resource mimeType="application/xml">
          <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
        <dc:relation>http://eprints.zu.edu.ua/17959/</dc:relation>
        <dc:title>Gibbs Diagrams in the Chemical Etching of Semiconductors</dc:title>
        <dc:creator>Tomashік, Z. F.</dc:creator>
        <dc:creator>Bіlevych, Ye. О.</dc:creator>
        <dc:creator>Tomashік, V. М.</dc:creator>
        <dc:creator>Kusіaк, N. V.</dc:creator>
        <dc:creator>Gumenіuк, О. R.</dc:creator>
        <dc:subject>QD Chemistry</dc:subject>
        <dc:date>2004</dc:date>
        <dc:type>Article</dc:type>
        <dc:type>PeerReviewed</dc:type>
        <dc:format>text</dc:format>
        <dc:language>uk</dc:language>
        <dc:identifier>http://eprints.zu.edu.ua/17959/1/KMBT28220150623150119.pdf</dc:identifier>
        <dc:identifier>  Tomashік, Z. F. and Bіlevych, Ye. О. and Tomashік, V. М. and Kusіaк, N. V. and Gumenіuк, О. R.  (2004) Gibbs Diagrams in the Chemical Etching of Semiconductors.  Phase Diagrams in Materials Science, MSI GmbH.  pp. 171-174.      </dc:identifier>
        <dc:language>english</dc:language></oai_dc:dc>
        </didl:Resource>
      </didl:Component>
    </didl:Item>
    <didl:Item>
      <didl:Descriptor>
        <didl:Statement mimeType="application/xml">
          <dip:ObjectType>info:eu-repo/semantics/objectFile</dip:ObjectType>
        </didl:Statement>
      </didl:Descriptor>
      <didl:Component>
        <didl:Resource mimeType="text" ref="http://eprints.zu.edu.ua/17959/1/KMBT28220150623150119.pdf"/>
      </didl:Component>
    </didl:Item>
    <didl:Item>
      <didl:Descriptor>
        <didl:Statement mimeType="application/xml">
          <dip:ObjectType>info:eu-repo/semantics/humanStartPage</dip:ObjectType>
        </didl:Statement>
      </didl:Descriptor>
      <didl:Component>
        <didl:Resource mimeType="application/html" ref="http://eprints.zu.edu.ua/17959/"/>
      </didl:Component>
    </didl:Item>
  </didl:Item>
</didl:DIDL>