eprintid: 17959
rev_number: 12
eprint_status: archive
userid: 65
dir: disk0/00/01/79/59
datestamp: 2015-06-23 20:46:31
lastmod: 2015-06-23 20:53:08
status_changed: 2015-06-23 20:46:31
type: article
metadata_visibility: show
title: Gibbs Diagrams in the Chemical Etching of Semiconductors
language: english
creators_name: Tomashік, Z. F.
creators_name: Bіlevych, Ye. О.
creators_name: Tomashік, V. М.
creators_name: Kusіaк, N. V.
creators_name: Gumenіuк, О. R.
ispublished: pub
subjects: QD
divisions: sch_che
full_text_status: public
date: 2004
date_type: published
publication: Phase Diagrams in Materials Science, MSI GmbH
pagerange: 171-174
refereed: TRUE
citation:   Tomashік, Z. F. and Bіlevych, Ye. О. and Tomashік, V. М. and Kusіaк, N. V. and Gumenіuк, О. R.  (2004) Gibbs Diagrams in the Chemical Etching of Semiconductors.  Phase Diagrams in Materials Science, MSI GmbH.  pp. 171-174.      
document_url: http://eprints.zu.edu.ua/17959/1/KMBT28220150623150119.pdf