"31401","12","archive","7838",,,"disk0/00/03/14/01","2020-07-24 16:01:20","2020-07-24 16:01:20","2020-07-24 16:01:20","article",,,"show",,,,"","","","","","","","","","",,,,"Хімічне розчинення монокристалів GaAs, InAs, InAs (Sn), GaSb та InSb у травильних композиціях H2O2–HBr–тартратна кислота","ukraine",,,,,,,,"","","","",,,,,,,"Томашик","З. Ф.","","","","","pub","QD","sch_che","public",,,,,"2020","published",,"Вопросы химии и химической технологии","4",,,,"163-171",,,,,,,,,,,"TRUE",,"0321-4095",,,,,,"",,"","",,"","",,,,,,"",,,,,,,"",,,,,"",,,,,"","",,,,,"","",
"31401",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Шелюк","І. О.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,
"31401",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Чайка","М. В.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,
"31401",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,"Томашик","В. М.","","",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,