eprintid: 10520 rev_number: 25 eprint_status: archive userid: 11 dir: disk0/00/01/05/20 datestamp: 2014-02-03 07:37:51 lastmod: 2015-08-15 05:39:13 status_changed: 2014-02-03 07:37:51 type: article metadata_visibility: show title: Mechanism of contact resistance formation in ohmic contacts with high dislocation density language: english abstract: A new mechanism of contact resistance formation in ohmic contacts with high dislocation density is proposed. Its specific feature is the appearance of a characteristic region where the contact resistance increases with temperature. According to the mechanism revealed, the current flowing through the metal shunts associated with dislocations is determined by electron diffusion. It is shown that current flows through the semiconductor near-surface regions where electrons accumulate. A feature of the mechanism is the realization of ohmic contact irrespective of the relation between the contact and bulk resistances. The theory is proved for contacts formed to III-V semiconductor materials as well as silicon-based materials. A reasonable agreement between theory and experimental results is obtained creators_name: Sachenкo, А. V. creators_name: Belyaev, А. Е. creators_name: Boltovets, N. S. creators_name: Konaкova, R. V. creators_name: Kudryк, Y. Y. creators_name: Novytsкyі, S. V. creators_name: Sheremet, V. N. creators_name: Lі, J. creators_name: Vіtusevіch, S. А. ispublished: pub subjects: QC subjects: TK divisions: sch_phy full_text_status: public date: 2012 date_type: published publication: Journal of Applied Physics volume: 111 number: 8 publisher: Американский институт физики pagerange: 083701-083701 refereed: TRUE issn: 0021-8979 official_url: ttp://jap.aip.org/ citation: Sachenкo, А. V., Belyaev, А. Е., Boltovets, N. S., Konaкova, R. V., Kudryк, Y. Y., Novytsкyі, S. V., Sheremet, V. N., Lі, J., Vіtusevіch, S. А. (2012) Mechanism of contact resistance formation in ohmic contacts with high dislocation density. Journal of Applied Physics, 111 (8). 083701-083701. ISSN 0021-8979 document_url: http://eprints.zu.edu.ua/10520/1/Sachenko%20A.V.%20%28Mechanism%20of%20contact%20resistance%20formation%20in%20ohmic%20contacts%20with%20high%20dislocation%20density%29%202012.pdf