@article{zu217959,
           title = {Gibbs Diagrams in the Chemical Etching of Semiconductors},
          author = {Z. F. Tomash?? and Ye. ?. B?levych and V. ?. Tomash?? and N. V. Kus?a? and ?. R. Gumen?u?},
            year = {2004},
           pages = {171--174},
         journal = {Phase Diagrams in Materials Science, MSI GmbH},
             url = {http://eprints.zu.edu.ua/17959/}
}