relation: http://eprints.zu.edu.ua/17959/ title: Gibbs Diagrams in the Chemical Etching of Semiconductors creator: Tomashік, Z. F. creator: Bіlevych, Ye. О. creator: Tomashік, V. М. creator: Kusіaк, N. V. creator: Gumenіuк, О. R. subject: QD Хімія date: 2004 type: Стаття type: PeerReviewed format: text language: uk identifier: http://eprints.zu.edu.ua/17959/1/KMBT28220150623150119.pdf identifier: Tomashік, Z. F., Bіlevych, Ye. О., Tomashік, V. М., Kusіaк, N. V., Gumenіuк, О. R. (2004) Gibbs Diagrams in the Chemical Etching of Semiconductors. Phase Diagrams in Materials Science, MSI GmbH. с. 171-174. language: english