%0 Journal Article
%A Tomashік, Z. F.
%A Bіlevych, Ye. О.
%A Tomashік, V. М.
%A Kusіaк, N. V.
%A Gumenіuк, О. R.
%D 2004
%F zu2:17959
%J Phase Diagrams in Materials Science, MSI GmbH
%P 171-174
%T Gibbs Diagrams in the Chemical Etching of Semiconductors
%U http://eprints.zu.edu.ua/17959/