TY  - JOUR
ID  - zu217959
UR  - http://eprints.zu.edu.ua/17959/
A1  - Tomash??, Z. F.
A1  - B?levych, Ye. ?.
A1  - Tomash??, V. ?.
A1  - Kus?a?, N. V.
A1  - Gumen?u?, ?. R.
Y1  - 2004///
JF  - Phase Diagrams in Materials Science, MSI GmbH
TI  - Gibbs Diagrams in the Chemical Etching of Semiconductors
SP  - 171
AV  - public
EP  - 174
ER  -