%A Z. F. Tomash??
%A Ye. ?. B?levych
%A V. ?. Tomash??
%A N. V. Kus?a?
%A ?. R. Gumen?u?
%J Phase Diagrams in Materials Science, MSI GmbH
%T Gibbs Diagrams in the Chemical Etching of Semiconductors
%D 2004
%P 171-174
%L zu217959