eprintid: 17959
rev_number: 12
eprint_status: archive
userid: 65
dir: disk0/00/01/79/59
datestamp: 2015-06-23 20:46:31
lastmod: 2015-06-23 20:53:08
status_changed: 2015-06-23 20:46:31
type: article
metadata_visibility: show
title: Gibbs Diagrams in the Chemical Etching of Semiconductors
language: english
creators_name: Tomashік, Z. F.
creators_name: Bіlevych, Ye. О.
creators_name: Tomashік, V. М.
creators_name: Kusіaк, N. V.
creators_name: Gumenіuк, О. R.
ispublished: pub
subjects: QD
divisions: sch_che
full_text_status: public
date: 2004
date_type: published
publication: Phase Diagrams in Materials Science, MSI GmbH
pagerange: 171-174
refereed: TRUE
citation:   Tomashік, Z. F., Bіlevych, Ye. О., Tomashік, V. М., Kusіaк, N. V., Gumenіuк, О. R.  (2004) Gibbs Diagrams in the Chemical Etching of Semiconductors.  Phase Diagrams in Materials Science, MSI GmbH.  с. 171-174.      
document_url: http://eprints.zu.edu.ua/17959/1/KMBT28220150623150119.pdf