@inproceedings{zu219948, booktitle = {XV ?????????? ??????????? ? ?????? ? ?????????? ?????? ?????? ? ??????????}, month = {???????}, title = {Influence of the composition of solutions HNO3-HI-glycerol on the process of chemical etching of CdTe and solid solution Zn?Cd1-?Te and Cd?Hg1-?Te}, author = {?. ?. ?????????????}, year = {2015}, pages = {356}, keywords = {CdTe, solid solutions,semiconductor materials, surfaces, chemical-mechanical, chemical-dynamic polishing (CDP).}, url = {http://eprints.zu.edu.ua/19948/}, abstract = {CdTe and solid solutions based on it have a sufficiently wide practical application. To produce work elements using these semiconductor materials, first must prepare accordingly their surfaces, for which chemical-mechanical and chemical-dynamic polishing (CDP) were using.} }