?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Chayka%2C+M.+V.&rft.aulast=Chayka&rft.aufirst=M.+V.&rft.date=%D0%A1%D0%B5%D1%80%D0%BF%D0%B5%D0%BD%D1%8C+2020&rft.title=Method+of+nanosized+relief+formation+on+the+CdTe+single+crystals+surface+by+bromine-emerging+etchants&rft.genre=proceeding